Hi,
I just want to find out the drive displacement now. I am not taking into consideration of the coriolis effect, (which ill be considering at a later point of time) I want to study how much the proof mass will displace for different combination of inputs. I have 4 fixed comb structure out of which 2 combs are given input voltage to excite the mass in the drive direction. So is it not possible to get the displacement if i use Structural(Electromechanics) physics? isnt it enough to give an input at its resonant frequency?eg : 10*sin(2*pi*resnt_freq).
I am unable to attach file,else i could have may be send the modal.
Here is a link which i saw in comsol, my modal is slightly different from this,so in this paper they have plotted Both Drive and Sense Displacements.
www.comsol.eu/paper/design-and...alysis-of-mems-gyroscope-13961
Thanks.
I just want to find out the drive displacement now. I am not taking into consideration of the coriolis effect, (which ill be considering at a later point of time) I want to study how much the proof mass will displace for different combination of inputs. I have 4 fixed comb structure out of which 2 combs are given input voltage to excite the mass in the drive direction. So is it not possible to get the displacement if i use Structural(Electromechanics) physics? isnt it enough to give an input at its resonant frequency?eg : 10*sin(2*pi*resnt_freq).
I am unable to attach file,else i could have may be send the modal.
Here is a link which i saw in comsol, my modal is slightly different from this,so in this paper they have plotted Both Drive and Sense Displacements.
www.comsol.eu/paper/design-and...alysis-of-mems-gyroscope-13961
Thanks.