HI,
I am a newbie to Comsol, and i am using 4.3 version and working on a mems gyroscope. i need to calculate electrostatic actuation force from the model,i am using a comb drive structure as an actuator.
I am not sure which physics i should use and how to calculate the force produced after giving an excitation voltage.
Thanks in advance
I am a newbie to Comsol, and i am using 4.3 version and working on a mems gyroscope. i need to calculate electrostatic actuation force from the model,i am using a comb drive structure as an actuator.
I am not sure which physics i should use and how to calculate the force produced after giving an excitation voltage.
Thanks in advance