Issue: Can not mesh my model

Hello,

I am trying to solve the following problem. My model is an electrostatic actuator. The active element is a prestressed cantilever beam made of two layers of Ni. The layers have different internal stresseswhich makes the beam curl shoul it be released by underetching of the sacrificial layer. The dimentions of the beam are 3000µm*1000µm*20µm. I use symmery, therefore, the width of the model is 500µm instead of 1000 µm. The distance between the beam and the bottom electrode is 0.4 µm. As a basis for this model I am using an example from the COMSOL MEMS Module Model Library "Cantilever Beam" 3D modelling with deformable meshes.

COMSOL successfully returns converted mapped/swept mesh for the beam and bottom electrode. But as soon as I try to mesh the air subdomain (using "mesh remaining(free)") , the following error appears

Error: 4100
Failed to generate mesh for subdomain.
- Subdomain: 2
Failed to respect boundary element edge on geometry face.
- Face: 9
- x coordinate: 0.000227273
- y coordinate: 0.000166667
- z coordinate: 1.04e-005
Internal error in boundary respecting.

I tried to change the aspect ratios for my model. It did not help.
Does anybody know, what could be done to overcome the issue?

Thank you!